Integrated silicon micromechanical sensors.

Integrated Micromechanical Resonant Sensors for Inertial Measurement Systems

Thumbnail-sized inertial measurement systems based on Micro Electro Mechanical Systems (MEMS) technology have been perceived as a breakthrough in the field of inertial navigation. However, even as micromechanical accelerometers have seen widespread commercialization, vibratory micromechanical gyroscopes have not enjoyed similar success. Previous approaches to high-performance micromechanical gy...

Micromechanical Photonic Integrated Circuits

The ability to integrate micro-optical elements with movable structures and microactuators has opened up many new opportunities for optical and optoelectronic systemsI2. It allows us to manipulate optical beams more effectively than conventional methods, and is scalable to large optical systems. Optical MEMS (MicroElectroMechanical Systems) have applications in display, sensing, and optical dat...

Integrated Optical Gas Sensors on Silicon-on-Insulator Platform

We demonstrate highly sensitive micro-optical hydrogen and ethanol sensors on SOI microring resonators (MRR) using chemical coatings sensitive to the corresponding gases. Hydrogen concentrations below the lower explosion limit and ethanol vapor concentration below 100ppm are detected. ©2010 Optical Society of America OCIS codes: (000.0000) General; (000.0000)

Integrated nanoscale silicon sensors using top-down fabrication

Semiconductor device-based sensing of chemical and biological entities has been demonstrated through the use of microand nanoscale field-effect devices and close variants. Although carbon nanotubes and silicon nanowires have been demonstrated as single molecule biosensors, the fabrication methods that have been used for creating these devices are typically not compatible with modern semiconduct...

Micromechanical Analysis of Soft Tactile Sensors